JPS6320921Y2 - - Google Patents
Info
- Publication number
- JPS6320921Y2 JPS6320921Y2 JP17649982U JP17649982U JPS6320921Y2 JP S6320921 Y2 JPS6320921 Y2 JP S6320921Y2 JP 17649982 U JP17649982 U JP 17649982U JP 17649982 U JP17649982 U JP 17649982U JP S6320921 Y2 JPS6320921 Y2 JP S6320921Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- control device
- clean room
- value
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 claims description 21
- 239000002245 particle Substances 0.000 claims description 13
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000007664 blowing Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 238000004378 air conditioning Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
Landscapes
- Control Of Positive-Displacement Air Blowers (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17649982U JPS5980629U (ja) | 1982-11-24 | 1982-11-24 | クリ−ンル−ムの送風量制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17649982U JPS5980629U (ja) | 1982-11-24 | 1982-11-24 | クリ−ンル−ムの送風量制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5980629U JPS5980629U (ja) | 1984-05-31 |
| JPS6320921Y2 true JPS6320921Y2 (en]) | 1988-06-09 |
Family
ID=30383715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17649982U Granted JPS5980629U (ja) | 1982-11-24 | 1982-11-24 | クリ−ンル−ムの送風量制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5980629U (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5381277B2 (ja) * | 2009-04-23 | 2014-01-08 | オムロン株式会社 | 送風制御パターン作成装置 |
-
1982
- 1982-11-24 JP JP17649982U patent/JPS5980629U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5980629U (ja) | 1984-05-31 |
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